IDP-3 Dry Scroll
Pump
The Varian IDP-3
Dry Scroll Pump is an innovative, compact, high-performance,
oil-free vacuum pump that is suitable for a wide variety of
applications. It is the smallest scroll pump made for general
vacuum applications, which makes it easy to integrate into OEM
systems, and it weighs only 21 pounds (9.5 kg). Yet with a
pumping speed of 60 liters/min. and a very low base pressure of
250 millitorr, it is the highest-performing dry pump in its
class.
See why it's better.
Features
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Oil-free,
for no contamination of the vacuum system |
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Hermetic
design with fully isolated motor and bearings |
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Small size:
14 � 7 � 6 inches (351 � 181 � 140 mm) |
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Lower base
pressure than diaphragm pumps |
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No
mechanisms subject to catastrophic failure |
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Low noise
and vibration |
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