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IDP-3 Dry Scroll Pump

The Varian IDP-3 Dry Scroll Pump is an innovative, compact, high-performance, oil-free vacuum pump that is suitable for a wide variety of applications. It is the smallest scroll pump made for general vacuum applications, which makes it easy to integrate into OEM systems, and it weighs only 21 pounds (9.5 kg). Yet with a pumping speed of 60 liters/min. and a very low base pressure of 250 millitorr, it is the highest-performing dry pump in its class.

See why it's better.

Features

Oil-free, for no contamination of the vacuum system
Hermetic design with fully isolated motor and bearings
Small size: 14 7 6 inches (351 181 140 mm)
Lower base pressure than diaphragm pumps
No mechanisms subject to catastrophic failure
Low noise and vibration
IDP-3 Dry Scroll Pump
The Complete Solution
Technical Specs & Drawings
Pumping Speed Graph
Ordering Information
IDP-3 Brochure (pdf 2.2 mB)
IDP-3 日本語 (pdf 2.3 mB)

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