Varian IDP-3 Dry Scroll Pump
At only 21 pounds, the 60-liter per minute Varian IDP-3 is the smallest dry scroll pump on the market. With a pumping speed of 60 liters per minute (2.1 CFM) and a base pressure of 250 millitorr, the IDP-3 compares favorably with diaphragm pumps for typical dry roughing/backing applications. When used in turbo backing applications, the IDP-3 with its lower base pressure (compared to a typical diaphragm pump), results in cooler turbo pump bearings and longer turbo pump life.
The IDP-3 was designed with maintenance in mind. If you've ever performed maintenance on a diaphragm pump, you'll appreciate the simplicity of the IDP-3. The IDP-3 also eliminates the hassle and expense of safely disposing your used mechanical pump oil.
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