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Magnetically levitated turbomolecular pumps - Overview

STP, Magnetically Levitated Pumps

Covenant Distributors offers the STP turbomolecular pump range with a pumping performance range from 300 to 3500 liters per second. The use of magnetic bearings ensures no risk of vacuum contamination, which is a vital feature in applications where even the tiniest impurity will affect results. And, the magnetic bearings do not need maintenance, an important factor in processes producing chemical or radioactive contamination. Noise and vibration levels are extremely low - the peak-to-peak level is as low as less than 0.001 m amplitude which remains constant throughout the life of the pump.

Covenant Distributors' BOC Edwards STP turbo pumps offer optimal performance and reliability. Our development team in Yachiyo-City, Japan has over 400 cumulative man-years of experience in the design and manufacture of high reliability, high speed rotating equipment, meeting the stringent requirements of the semiconductor and flat panel industries. There are well over 50,000 STP pumps installed worldwide, the majority of them are operating on semiconductor process tools. Every major semiconductor manufacturing facility has a population of STP pumps, demonstrating exceptional levels of reliability and performance with low running costs.

Applications:
Semiconductor applications: plasma etch, film deposition (CVD, HDPCVD, ECRCVD, MOCVD), sputtering, ion implantation, wafer inspection, load lock chambers.

Scientific applications: surface analysis, mass spectrometry, electron microscopy, high-energy physics (beam lines, accelerators) and radioactive applications (fusion systems, cyclotrons).

Download the Turbomolecular Vacuum Pumps Brochure.

 

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