Magnetically
levitated
turbomolecular
pumps
-
Overview
STP,
Magnetically
Levitated
Pumps
Covenant
Distributors
offers
the
STP
turbomolecular
pump
range
with
a
pumping
performance
range
from
300
to
3500
liters
per
second.
The
use
of
magnetic
bearings
ensures
no
risk
of
vacuum
contamination,
which
is
a
vital
feature
in
applications
where
even
the
tiniest
impurity
will
affect
results.
And,
the
magnetic
bearings
do
not
need
maintenance,
an
important
factor
in
processes
producing
chemical
or
radioactive
contamination.
Noise
and
vibration
levels
are
extremely
low
-
the
peak-to-peak
level
is
as
low
as
less
than
0.001
µm
amplitude
which
remains
constant
throughout
the
life
of
the
pump.
Covenant
Distributors'
BOC
Edwards
STP
turbo
pumps
offer
optimal
performance
and
reliability.
Our
development
team
in
Yachiyo-City,
Japan
has
over
400
cumulative
man-years
of
experience
in
the
design
and
manufacture
of
high
reliability,
high
speed
rotating
equipment,
meeting
the
stringent
requirements
of
the
semiconductor
and
flat
panel
industries.
There
are
well
over
50,000
STP
pumps
installed
worldwide,
the
majority
of
them
are
operating
on
semiconductor
process
tools.
Every
major
semiconductor
manufacturing
facility
has
a
population
of
STP
pumps,
demonstrating
exceptional
levels
of
reliability
and
performance
with
low
running
costs.
Applications:
Semiconductor
applications:
plasma
etch,
film
deposition
(CVD,
HDPCVD,
ECRCVD,
MOCVD),
sputtering,
ion
implantation,
wafer
inspection,
load
lock
chambers.
Scientific
applications:
surface
analysis,
mass
spectrometry,
electron
microscopy,
high-energy
physics
(beam
lines,
accelerators)
and
radioactive
applications
(fusion
systems,
cyclotrons).
Download
the
Turbomolecular
Vacuum
Pumps
Brochure.
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